VACUUM PROCESS APPARATUS,申请号KR20050043067-传众专利搜索

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发明名称	VACUUM PROCESS APPARATUS
摘要
申请公布号	KR20060049437(A)	申请公布日期	2006.05.19
申请号	KR20050043067	申请日期	2005.05.23
申请人	ULVAC, INC.	发明人	SHISHIKURA MASATO;MORI KATSUHIKO;NAKAJIMA TOSHIO;ARAI SUSUMU
分类号	C23C14/56;H01J9/20;H01J9/44	主分类号	C23C14/56
代理机构		代理人
主权项
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