发明名称 |
APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE |
摘要 |
<p>To inhibit application unevenness by optimizing the state of a slit nozzle. In a slit nozzle 41, the first lip side 410a of a first lip 410 is arranged in the position where only a level difference D is lower than the second lip side 411a of a second lip 411. Preliminary application processing is performed by applying resist liquid to a roller 71 of a spare applying member while making the slit nozzle 41 scan in the direction ((-X) direction) opposite to the scanning direction ((+X) direction) of the slit nozzle 41 in this application processing. The application processing is performed by applying the resist liquid to a substrate 90 while making the slit nozzle 41 scan in the direction (+X) which is normalized by the preliminary application processing.</p> |
申请公布号 |
KR20060051708(A) |
申请公布日期 |
2006.05.19 |
申请号 |
KR20050090231 |
申请日期 |
2005.09.28 |
申请人 |
DAI NIPPON SCREEN MFG. CO., LTD. |
发明人 |
TAKAGI YOSHINORI;OKADA HIROSHI;KAWAGUCHI YASUHIRO |
分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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