| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for stably forming a plurality of patterns of a magnetic layer having uniform thickness, by using a frame plating method. SOLUTION: This pattern-forming method comprises the steps of: acquiring correlative data which shows correlation between the thicknesses of frame members in a photoresist pattern and the thicknesses of plated films; on the basis of the data, forming the photoresist pattern 104 comprising frame members 104F1 to 104F3 with different thicknesses depending on respective openings 104K1 to 104K3, by changing the thicknesses of the frame members 104F1 to 104F3 according to the respective openings 104K1 to 104K3; and separately forming the plated film in each of the openings 104K1 to 104K3 in the photoresist pattern 104 to form a plurality of the patterns 105 of the magnetic layer. Thereby, the thicknesses of a series of the formed patterns 105 hardly disperse, in other words, the thicknesses of a series of the formed patterns 105 become uniform. COPYRIGHT: (C)2006,JPO&NCIPI |
