| 摘要 |
PROBLEM TO BE SOLVED: To accurately execute a deposition process in manufacturing an organic LED. SOLUTION: Trapezoidal projecting parts 150 and 152 are formed as fitting parts on the upper surface of a deposition mask 10 having through-holes 54, 60... for deposition. On the undersurface of a substrate 100, corresponding recessed parts 160 and 162 are formed. Deposition is carried out with both of them fitted to each other. Thereby, displacement caused by thermal expansion can be prevented. The fitting parts may be arranged around the circumference of a panel made on the substrate 10 or may be arranged around pixels comprising a plurality of organic luminescent elements. COPYRIGHT: (C)2006,JPO&NCIPI
|
