| 摘要 |
PROBLEM TO BE SOLVED: To provide a detector for detecting the projection of a glass wafer from an FOUP or the poor holding of the glass wafer easily and conveniently in an FIMS. SOLUTION: In the detector comprising a light transmitting sensor and a light reflecting sensor, the light receiving section and light projecting section of the light reflecting sensor and one of the light projecting section and the light receiving section of the light transmitting sensor are arranged on one side of a position where a substrate to be detected exists, and the other of the light projecting section and the light receiving section of the light transmitting sensor is arranged on the other side of a position where the substrate to be detected exists. COPYRIGHT: (C)2006,JPO&NCIPI |
