| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a rotary cup type coater that can effectively prevent the scattering of an applied liquid. <P>SOLUTION: In the rotary cup type coater, a tray 7 is fixed on an inner cup 3 and drain introducing pipes 10 are led out from each corner of the tray 7. The tips 11 of the drain introducing pipes 10 are obliquely inclined downwardly toward the outside so that the tips 11 may be directed toward the bottoms of drain recovering passages 3a. In addition, the lower ends 11a of the tips 11 are made lower than the bottom face 3b of the inner cup 3. Consequently, the applied liquid supplied to the surface of a plate-like object W to be treated does not collide directly with the inner peripheral wall of the inner cup 3 when the liquid is discharged through the holes formed in an eave-like wall 9, flow passages in the drain introducing pipes 10, and the tips 11 of the pipes 10 with a centrifugal force by integrally rotating the inner cup 3 and tray 7. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
