Production method e.g. for reproducible micro drillings, having micro drilled hole with diameter of maximally 110micro m and aspect relationship of least 10 with drilling provided by electro-chemical process

摘要

The method involves having a micro drilled hole with a diameter of maximally 110micro m and an aspect relationship of at least 10. The micro drilling (30) is provided by an electro-chemical process having an electrode (40) provided in a workpiece (10) and a prior pilot hole (20) being of smaller diameter (D20) than the micro drilled hole. The electro-chemical process in presence of an electrolyte (50) creates an electrical potential between the electrode (40) and the workpiece. The electrode is at an external position (52, 54) of the pilot hole and under electro-chemical process clears away a section of a wall of the pilot hole by dissolving in the electrolyte (50), and gradually into the workpiece and the pilot hole (20) is moved forward to expand on a desired diameter (D30) of the micro drilling. An independent claim is included for a device.