| 摘要 |
<P>PROBLEM TO BE SOLVED: To rapidly create a master pattern for use in a detection apparatus such as a pattern defect detection apparatus. <P>SOLUTION: An image of a manufactured pattern is picked up and binarized (200, 202). For each one pixel, binarized data is read to generate a run-length code (204). Once a run-length process for all the pixels is completed (206), the run-length codes are stored (208). After a predetermined number of processes are completed (210), one manufactured pattern is set as a temporary master pattern (212) and a different manufactured pattern is set as a matching pattern (214). A matching process for determining the correlation between the temporary master pattern and the matching manufactured pattern is performed (216). After all the correlations are determined (218), the run-length code having a higher correlation between the manufactured patterns is set, whereby the master pattern is created (220). <P>COPYRIGHT: (C)2006,JPO&NCIPI |
