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发明名称
METHOD FOR MANUFACTURING EXTREMELY HIGH VACUUM ION PUMP
摘要
申请公布号
KR100583283(B1)
申请公布日期
2006.05.18
申请号
KR20050063351
申请日期
2005.07.13
申请人
V M T CO., LTD.
发明人
CHUNG, SUK MIN;HA, TAE KYUN;LEE, DEUK JIN;KIM, DONG SOO;JUNG, JIN GUK;KIM, GYUNG DONG
分类号
C23C26/00
主分类号
C23C26/00
代理机构
代理人
主权项
地址
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