发明名称 PATTERN FORM AND METHOD FOR MANUFACTURING IT
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a high-quality pattern form and a method for manufacturing it which provide only the objective area with high and fine liquid-repellent properties, in forming lyophilic and liquid-repellent patterns utilizing plasma irradiation. <P>SOLUTION: The method for manufacturing the pattern form is provided, which includes a plasma irradiation step for providing the liquid-repellent properties on a resin layer, by irradiating with plasma a patterning substrate having a base member, a photocatalyst containing layer including at least a photocatalyst formed on the base member, and the resin layer formed into the pattern on the photocatalyst containing layer and including at least the resin, using a fluorine compound, as the gas to be introduced. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p>
申请公布号 JP2006126783(A) 申请公布日期 2006.05.18
申请号 JP20050183750 申请日期 2005.06.23
申请人 DAINIPPON PRINTING CO LTD 发明人 KOBAYASHI HIRONORI;MATSUKAWA REIO
分类号 G02B5/20;B01J35/02;B32B3/10;G02B3/00;H01L51/50;H05B33/10;H05B33/12;H05B33/22 主分类号 G02B5/20
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