| 摘要 |
A stage assembly ( 220 ) that moves a work piece ( 200 ) along a first axis, along a second axis and along a third axis includes a first stage ( 238 ), a first mover assembly ( 242 ) that moves the first stage ( 238 ) along the first axis, a second stage ( 240 ) that retains the work piece ( 200 ), a second mover assembly ( 244 ), and a non-contact bearing ( 257 ). The second mover assembly ( 244 ) moves the second stage ( 240 ) relative to the first stage ( 238 ) along the first axis, along the second axis, and along the third axis. The non-contact bearing ( 257 ) supports the mass of the second stage ( 240 ). Further, the non-contact bearing ( 257 ) allows the second stage ( 240 ) to move relative to the first stage ( 238 ) along the first axis and along the second axis. The second mover assembly ( 244 ) can move the second stage ( 240 ) with at least four degrees of movement.
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