METHOD FOR ENHANCING FLUORINE UTILIZATION,申请号KR20050066728-传众专利搜索

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发明名称	METHOD FOR ENHANCING FLUORINE UTILIZATION
摘要
申请公布号	KR20060046589(A)	申请公布日期	2006.05.17
申请号	KR20050066728	申请日期	2005.07.22
申请人	AIR PRODUCTS AND CHEMICALS, INC.	发明人	DINGJUN WU;BING JI;EUGENE JOSEPH KARWACKI JR.
分类号	H01L21/02;H01L21/205;H01L21/3065	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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