发明名称 Method for making thin fused glass articles
摘要 A method suited for producing thin fused glass articles includes, in preferred aspects, preparing a dry gel having edges configured to reduce or eliminate warping of the gel during densification of the gel. Preferred aspects include partially densifying the gel, machining the gel into a suitable shape, and fully sintering the gel. The gel preferably is a hybrid incorporating silicon alkoxide and fumed silica particles, and it preferably is machined to have chamfered edges. The method is easier and more cost-effective than those previously known, and it allows for production of high-quality articles for use in, for example, photomask systems as pellicles.
申请公布号 US7043940(B2) 申请公布日期 2006.05.16
申请号 US20030390336 申请日期 2003.03.17
申请人 YAZAKI CORPORATION 发明人 GANGULI RAHUL
分类号 C03B8/02;C03B19/12;C03C19/00 主分类号 C03B8/02
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