发明名称 Testing system, a computer implemented testing method and a method for manufacturing electronic devices
摘要 A testing system includes a testing device configured to test product characteristics of a first sample by sampling the first sample from a population; a main storage device configured to store analysis information and testing information, the testing information includes a confidence interval tolerance of the first sample; an analysis module configured to analyze at least one of statistical data and a confidence interval of a mean value of the population, based on the analysis information; and a calculation module configured to calculate a first sampling number of the first sample, based on results of the analysis module.
申请公布号 US7047147(B2) 申请公布日期 2006.05.16
申请号 US20040947259 申请日期 2004.09.23
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 ASANO MASAHUMI
分类号 H01L21/66;H01L21/02 主分类号 H01L21/66
代理机构 代理人
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