发明名称 Proximity effect correction apparatus, proximity effect correction method, storage medium, and computer program product
摘要 Light intensity values only of the vicinity of a specified portion, that is, for example, based on a prescribed value, an area where the distance between edges of an object to be corrected is equal to or shorter than the prescribed value are calculated, and the object to be corrected is corrected based on the light intensity values.
申请公布号 US7047516(B2) 申请公布日期 2006.05.16
申请号 US20030379535 申请日期 2003.03.06
申请人 FUJITSU LIMITED 发明人 FUTATSUYA HIROKI
分类号 G03F1/08;G06F17/50;G03C5/00;G03F1/14;G03F1/36;G03F1/68;G03F7/20;G06F1/00;G06K9/00;H01L21/027;H01L21/82 主分类号 G03F1/08
代理机构 代理人
主权项
地址