发明名称 Microfabrication method based on metal matrix composite technology
摘要 A method of fabricating microstructural components, microparts assemblies and microparts is disclosed. The method includes fabricating a unidirectional metal matrix composite made of materials selected to allow precise etching of different structural elements of the given composite without damage to each other. Cutting a composite to form slices or sections. Etching a matrix entirely out will produce wide assortment of microparts. Partial removal of matrix will form an array of microprotrusions protruding from a substrate. Etching out the microprotrusions cores will form hollow microprotrusions. The method of invention is suitable for fabricating of variety of microcomponents. For example: microneedles-a medical microdevice component having micron features, arrays of high strength micropins and micropunches, and precisely controlled unique microstructural surfaces.
申请公布号 US7045069(B2) 申请公布日期 2006.05.16
申请号 US20030702856 申请日期 2003.11.06
申请人 OZERYANSKY GENNADY 发明人 OZERYANSKY GENNADY
分类号 H01L21/00;A61M37/00;C23F1/00;C23F1/04 主分类号 H01L21/00
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