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发明名称
HEAT TREATMENT EQUIPMENT
摘要
申请公布号
KR20060042664(A)
申请公布日期
2006.05.15
申请号
KR20040091404
申请日期
2004.11.10
申请人
CHO, JEONG HEE
发明人
CHO, JEONG HEE
分类号
H01L21/324
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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