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发明名称
摘要
申请公布号
DE2030917(A1)
申请公布日期
1971.01.14
申请号
DE19702030917
申请日期
1970.06.23
申请人
发明人
分类号
H01L29/78;H01L21/331;H01L21/762;H01L21/8249;H01L27/00;H01L27/06;H01L29/00;H01L29/73;(IPC1-7):H01L11/14
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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