| 发明名称 |
Method of manufacturing an external force detection sensor |
| 摘要 |
A method of manufacturing an external force detection sensor in which a sensor element is formed by through-hole (20) dry etching of an element substrate (3), and an electrically conductive material is used as an etching stop layer (18) during the dry etching. |
| 申请公布号 |
EP1655610(A2) |
申请公布日期 |
2006.05.10 |
| 申请号 |
EP20060001026 |
申请日期 |
2000.04.14 |
| 申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
OGUCHI, TAKAHIRO |
| 分类号 |
G01P15/08;H01L21/302;B81B3/00;B81C1/00;G01C19/56;G01P9/04;G01P15/125;H01L21/3065;H01L29/84 |
主分类号 |
G01P15/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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