PATTERN MATCHING METHOD AND DEVICE, POSITION DETERMINING METHOD AND DEVICE, POSITION ALIGNING METHOD AND DEVICE, EXPOSING METHOD AND DEVICE, AND DEVICE AND ITS PRODUCTION METHOD

摘要

A template generator (32) generates a waveform template including an expected value of a signal value at each value of a parameter and a probability template including a piece of occurrence probability information of the expected value at each value of the parameter, based on a plurality of measured signal waveforms, and a matching judgment unit (33) performs template matching between a newly measured signal waveform and the waveform template by using pieces of occurrence probability information of the expected values as pieces of weight information at respective values of the parameter, the pieces of occurrence probability information composing the probability template. Additionally, the template generator (32) updates the waveform template and probability template taking into account the newly measured signal waveform so as to prepare next pattern matching. In this way, the template matching on the signal waveform that varies according to the change of the parameter's value is performed with improved accuracy of matching.