| 摘要 |
PURPOSE:To extract only reflected charged particles and improve picture quality by providing a pole piece that is provided with a charged particle rays path connected to a sample and is insulated from the sample and applying potential difference between the sample and pole piece and then confining secondary electrons from the sample. CONSTITUTION:An objective lens 3 is provided with an electron rays path 2 connected to a sample 1 and a pole piece 3a that is insulated from the sample 1. In addition, to confine secondary electrons from the sample 1 and extract only reflected electrons, a means M that applies potential difference is provided between the mutually insulated sample 1 and piece 3a. As a result, an electric field is formed toward the piece 3a from the sample 1 and the secondary electrons emitted from the sample 3 are confined and only the reflected electrons jump out upward. When the reflected electrons collide against the inner wall of the piece 3a, i.e. the inner wall and such of the path 2, the secondary electrons are generated. These secondary electrons are caught by a secondary electron detector 6 that is arranged at the upper part of the lens 3 and the picture quality of a reflected electron picture can be improved. Furthermore, voltage can be applied by providing an electrode that is insulated from the sample 1 on the path 2. |
