| 摘要 |
<p>A carrying system, a substrate treating device, and a carrying method. In the carrying system (1), a carrying route covered by a cover body (5) is laid down so as to pass the lower side of loading tables (11) mounted on the front sides of treating devices (10), (100), and (200). Since the carrying route is positioned on the underside of the loading tables, the occupied areas of the loading tables (11) is shared with a part of an area related to the carrying route, and the saving of space can be achieved. Also, an accessibility to the treating devices (10), (100), etc. from the front side is increased to realize an easily maintainable layout. The loading surfaces (11d) of the loading tables (11) are set to a height allowing the installation of the automated guided vehicles (3) of an existing overhead carrying system (2) and a floor carrying system to secure the co-existence of the carrying system with the other carrying systems.</p> |
