CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND INTRACORPOREAL ULTRASOUND DIAGNOSTIC SYSTEM USING SAME

摘要

Disclosed is a capacitive micromachined ultrasonic transducer which is composed of transducer elements respectively comprising a transducer cell which is composed of a silicon substrate, a first electrode arranged on the upper surface of the silicon substrate, a second electrode arranged opposite to the first electrode at a certain distance and a membrane supporting the second electrode. This capacitive micromachined ultrasonic transducer is characterized in that a groove portion is formed between two adjacent transducer elements and the groove portion is provide with a conductive film.