摘要 |
<p>The present invention is a substrate holder system for and method of providing a substrate-to-mask alignment mechanism, securing mechanism and temperature control mechanism. The substrate holder system is suitable for use in an automated shadow mask vacuum deposition process. The substrate holder system includes a system controller, and a substrate arranged between a magnetic chuck assembly and a mask holder assembly. The magnetic chuck assembly includes a magnetic chuck, a thermoelectric device, a plurality of thermal sensors and a plurality of light sources. The mask holder assembly includes a shadow mask, a mask holder, a motion control system and a plurality of cameras. The substrate holder system of the present invention provides close contact between the substrate and the shadow mask thereby avoiding the possibility of evaporant material entering into a gap therebetween.</p> |
申请人 |
ADVANTECH GLOBAL, LTD.;BRODY, THOMAS, P.;MALMBERG, PAUL, R.;CONRAD, JEFFREY, W. |
发明人 |
BRODY, THOMAS, P.;MALMBERG, PAUL, R.;CONRAD, JEFFREY, W. |