Electolytic processing apparatus

摘要

An electrolytic processing apparatus has at least one processing electrode ( 86 ) and at least feeding electrode ( 86 ) disposed on the same side as the processing electrode ( 86 ) with respect to a substrate (W). An organic compound having an ion exchange group is chemically bonded to at least one of a surface of the processing electrode ( 86 ) and a surface of the feeding electrode ( 86 b) to form an ion exchanger ( 90 ). The electrolytic processing apparatus also has a substrate holder ( 42 ) for holding the substrate (W) and bringing the substrate (W) into contact with or close to the processing electrode ( 86 ). The electrolytic processing apparatus includes a power supply ( 48 ) for applying a voltage between the processing electrode ( 86 ) and the feeding electrode ( 86 ), and a fluid supply unit ( 92, 94 ) for supplying a fluid between the substrate (W) and the processing electrode ( 86 ).