发明名称 MICROFABRICATED CANTILEVER CHIP
摘要 <p>The present invention relates to a device and system from doing mechanical and electrical measurements and manipulation on nano or micro sized objects (206) using a sample holder adapted to fit in situ of a transmission electron microscope. The sample 5 holder comprise at least two arms (203, 204) each with at least one connector (201 , 202) whereby the sample (206) may be mounted between the two connectors (201 , 202) forming a bridge closing a gap (205) between the two arms (203, 204) of the sample holder (200). The sample holder (200) is arranged to provide mechanical forces to a sample (206) mounted on the sample holder and measuring and/or applying electrical 0 signals from the sample (206) while at the same imaging using the transmission electron microscope. Each arm of the sample holder may comprise three substantially parallel beams for electro-thermal actuation.</p>
申请公布号 WO2006046924(A1) 申请公布日期 2006.05.04
申请号 WO2005SE01631 申请日期 2005.10.28
申请人 NANOFACTORY INSTRUMENTS AB;MOLHAVE, KRISTIAN 发明人 MOLHAVE, KRISTIAN
分类号 H01L41/09;G01B7/00;G01G3/13;H01J37/26 主分类号 H01L41/09
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