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发明名称
Verfahren zum Ausbilden einer integrierten Halbleiterschaltungsanordnung
摘要
申请公布号
DE102004026232(B4)
申请公布日期
2006.05.04
申请号
DE200410026232
申请日期
2004.05.28
申请人
INFINEON TECHNOLOGIES AG
发明人
RIEGER, JOHANN;LIPP, STEFAN;ZEINDL, HANS;DETZEL, THOMAS;MAIER, HUBERT
分类号
H01L21/768;H01L21/283
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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