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发明名称
METHOD OF PRODUCING DIELECTRIC ISOLATION FOR MONOLITHIC CIRCUIT
摘要
申请公布号
US3579391(A)
申请公布日期
1971.05.18
申请号
USD3579391
申请日期
1967.01.05
申请人
TRW INC.
发明人
JAMES LANG BUIE
分类号
H01L21/316;H01L21/762;H01L21/8222;(IPC1-7):H01L7/36
主分类号
H01L21/316
代理机构
代理人
主权项
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