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发明名称
SEMICONDUCTOR MANUFACTURING APPARATUS USING PLASMA
摘要
申请公布号
KR20060037582(A)
申请公布日期
2006.05.03
申请号
KR20040086581
申请日期
2004.10.28
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, JUNG WOOK;KIM, MYOUNG WOON;KWON, TAE YONG;LEE, JIN SEOK
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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