| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical device capable of air-cooling an optical means while keeping the optical means under atmospheric conditions. <P>SOLUTION: The optical device for optically inspecting an object (CA) provided in a vacuum includes a vacuum chamber (4) for keeping the inside in vacuum, optical means (1-3), and a window for surrounding the optical means (1-3) to permit light from the means (1-3) to transmit through. It also includes surrounding members (11, 21 and 31) for making a space around the optical means (1-3) communicate with a space outside the vacuum chamber (4). An air inlet path (50) for introducing the air outside the vacuum chamber (4) into the optical means (1-3) and an air discharging path (52) for discharging the air in the optical means (1-3) to the outside of the chamber (4) are formed on the surrounding members (11, 21 and 31). <P>COPYRIGHT: (C)2006,JPO&NCIPI |
