| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-Y moving table with which smooth linear motion of low friction can be obtained and rigidity and positioning precision is improved without increasing weight of the table. <P>SOLUTION: In the X-Y moving table 8 having rolling guides 33, at least a pair of permanent magnets 35 are suspended in longitudinal directions on the lower face 29a of a Y stage 29 along a pair of rails 24 and 24. The permanent magnets 35 are made to confront to a base 28 through a prescribed air gap, and prescribed magnetic attraction force is operated on the direction of the base 28. Thus, the X-Y moving table 8 can be supplied where floating is prevented, smooth linear motion of low friction can be obtained and rigidity and positioning precision are improved without increasing weight of an X table 14 and a Y table 15. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
