摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a polymer which simultaneously satisfies good optical transparency and alkali solubility, does not consume an acid produced through exposure and is useful as a resin for a photoresist, and a method for preparing a polymerizable compound without producing waste solution of a halide. <P>SOLUTION: The polymer has a structural unit derived from the polymerizable compound of formula (I) (wherein R<SP>1</SP>is a hydrogen atom or a methyl group; and R<SP>2</SP>is a protective group that is released by the action of an acid). The production method of the polymerizable compound involves a reaction of p-hydroxyethyl phenol and (meth)acrylic anhydride in the presence of an acid catalyst, a transesterification reaction between p-hydroxyethyl phenol and a (meth)acrylate and an esterification reaction between p-hydroxyethyl phenol and a (meth)acrylic acid. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |