摘要 |
<p><P>PROBLEM TO BE SOLVED: To obtain polycrystalline silicon satisfying the purity matching a solar cell material stably at a low cost using a Siemens method or a mono-silane method. <P>SOLUTION: The polycrystalline silicon raw material for the photovoltaic power generation is a polycrystalline silicon obtained by supplying a raw material silane gas on a red-hot silicon seed rod in a tightly closed reaction furnace under a high temperature and thermally decomposing or reducing with hydrogen, shows p-type or n-type conduction, has 3-500Ωcm resistivity and 2-500μs life time, and is used for the manufacture of the silicon wafer for the silicon wafer for the photovoltaic power generation. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |