| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To increase the contrast between a wiring part and a resin film part to easily detect a wiring pattern by reflective illumination. <P>SOLUTION: A TAB tape 5 having the wiring pattern formed thereon is unwound from a feed-out reel 11 to be fed to an inspection part 1 and illuminated by a reflective illumination means 1a to image the inspection pattern on the TAB tape 5 by an imaging means 1b in the inspection part 1. The image of the imaged inspection pattern is sent to a control part 4 and compared with a reference pattern to judge the quality of the pattern. The light source of the reflective illumination means 1a is, for example, an infrared LED for emitting, for example, only light with a wavelength of 500 nm or above. Since the wavelength of is illuminated only by the light with the wavelength of 500 nm or above which penetrates the TAB tape 5, an image of good contrast can be obtained. Further, if the infrared reflectivity of a stage 1c is not set to 10% or below and the stage 1c is not provided, an image further good in contrast can be obtained. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
