| 摘要 |
PROBLEM TO BE SOLVED: To provide a electrostatic capacity detecting device that is high in resistance against the electrostatic breakdown. SOLUTION: The electrostatic capacity detecting device for reading the surface shape of an object in which the electrostatic capacity detecting elements (1) are arranged in M lines, and N columns and the electric source lines for feeding electric source to each electrostatic capacity detecting element (1) are provided. The electrostatic capacity detecting element (1) comprises the signal detecting element (4) for accumulating charges corresponding to the electrostatic capacitance, and the signal-amplifying element (T1) for amplifying the signal, corresponding to the charges accumulated by the signal detection element (4). The signal detecting element (T1) includes the capacitance detecting electrode (41) and the capacitance detecting dielectric film (42), provided on the side between the capacitance detection electrode (41) and the object contacting side. Especially, the capacitance detecting film (42) is provided with an insulating film (160) and a semiconductor film (162). COPYRIGHT: (C)2006,JPO&NCIPI
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