SEMICONDUCTOR PHOTO-LITHOGRAPHY DEVICE HAVING WAFER CENTERING UNIT,申请号KR20040084601-传众专利搜索

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发明名称	SEMICONDUCTOR PHOTO-LITHOGRAPHY DEVICE HAVING WAFER CENTERING UNIT
摘要
申请公布号	KR20060035225(A)	申请公布日期	2006.04.26
申请号	KR20040084601	申请日期	2004.10.21
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	JO, YOUNG HUN
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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