| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring method capable of performing three-dimensional shape measurement accurately at high speed by using a two-dimensional array type confocal optical system, and performing easily manufacture or aligning of each part. SOLUTION: Light emitted from a light source 1 is branched plurally, and a measuring object 9 is irradiated therewith through an objective lens 5. The measuring object 9 is moved relatively in the optical axis direction, and reflected light at each time of movement is detected by a photodetector array 8. Data processing is performed relative to a pair formed by the position data at each time in the optical axis direction of the measuring object 9 and a detection signal of the photodetector array 8 at that time. Hereby, the surface shape of the measuring object 9 is measured three-dimensionally, and the light emitted from the light source 1 is branched plurally through a diffraction grating 3. COPYRIGHT: (C)2006,JPO&NCIPI
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