| 摘要 |
Embodiments of the invention eliminate, in an elemental analysis made of fine particles trapped using a conventional analytical filter, a hindrance to correct identification of elements of the fine particles as an original object of measurement that would otherwise cause the X-ray analyzer to measure elements of a filter base in addition to those of the fine particles. In one embodiment, an analytical filter includes a filter base and a metallic coating film. The filter base made of a resin has a plurality of filtering holes, each having a hole diameter ranging between about 100 nm and 1000 nm. The metallic coating film is formed on one face of the filter base through ion sputtering of gold (Au). The metallic coating film is so thick that an electron beam from an X-ray analyzer does not penetrate therethrough and the filtering holes are not plugged up. The metallic coating film is at least about 40 nm thick and is preferably about 40 nm to 100 nm thick.
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