| 摘要 |
PROBLEM TO BE SOLVED: To prevent a metal film for regulating frequency from being scattered during fabrication process while sustaining the profile at the crystal wafer side end. SOLUTION: A multilayer film of a Cr film 6a and an Au film 6b is formed on the entire surface of a crystal wafer 5, and a resist pattern 10 is formed thereon in the profile of crystal piece. Since the resist pattern 10 is not formed at the crystal wafer 5 side end, the Cr film and Au film at that portion are removed by etching in subsequent process. A protective film 11 of photosensitive resin is formed at the crystal wafer 5 side end where the crystal wafer 5 is exposed by removing the Cr film 6a and the Au film 6b thus protecting the crystal wafer 5 side end in the subsequent etching process. A tuning fork crystal oscillator provided with an excitation electrode 3 and a metal film 4 for regulating frequency is then fabricated in accordance with conventional fabrication process. COPYRIGHT: (C)2006,JPO&NCIPI
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