| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor for easily reducing a diameter by a simple structure. SOLUTION: The pressure sensor comprises a stem 10 having a diaphragm 12, a housing 20 in a shape for surrounding the stem 10, a sensor chip 30 for converting the amount of distortion of the diaphragm 12 that is distorted according to introduced pressure to an electric signal, and a processing circuit chip 40 for processing an electric signal from the sensor chip 30 for outputting to the outside. A relay region 60 in which a plurality of conductive pads 61 are arranged is formed at the upper end section of the housing 20, and the sensor chip 30 and the processing circuit chip 40 are connected electrically by bonding wires 70a, 70b via the relay region 60. COPYRIGHT: (C)2006,JPO&NCIPI
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