发明名称 |
CRUCIBLE FOR VAPOR-DEPOSITING SUBSTRATE TO BE TREATED FOR ORGANIC ELECTROLUMINESCENCE DIODE, VAPOR DEPOSITION SYSTEM AND VAPOR DEPOSITION METHOD |
摘要 |
PROBLEM TO BE SOLVED: To solve the reduction of reproducibility at the time of vapor deposition and the problem generated in an organic material. SOLUTION: A crucible 12 for vapor deposition for vapor-depositing an organic layer onto a substrate to be treated for an organic electroluminescence diode is provided with: a bottom part 11 at which an organic material is arranged at the time of vapor deposition treatment; an opening part 13 from which the vaporized organic material is exhausted at the time of the vapor deposition; and at least one bent part 14 provided between the bottom part and the opening part in such a manner that the bottom part is not viewed from the opening part. Further, a vapor deposition system and a vapor deposition method are provided. COPYRIGHT: (C)2006,JPO&NCIPI
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申请公布号 |
JP2006104524(A) |
申请公布日期 |
2006.04.20 |
申请号 |
JP20040293390 |
申请日期 |
2004.10.06 |
申请人 |
FUJI ELECTRIC HOLDINGS CO LTD |
发明人 |
MATSUKAZE NORIYUKI |
分类号 |
C23C14/24;C23C14/12;H01L51/50;H05B33/10 |
主分类号 |
C23C14/24 |
代理机构 |
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主权项 |
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地址 |
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