发明名称 CRUCIBLE FOR VAPOR-DEPOSITING SUBSTRATE TO BE TREATED FOR ORGANIC ELECTROLUMINESCENCE DIODE, VAPOR DEPOSITION SYSTEM AND VAPOR DEPOSITION METHOD
摘要 PROBLEM TO BE SOLVED: To solve the reduction of reproducibility at the time of vapor deposition and the problem generated in an organic material. SOLUTION: A crucible 12 for vapor deposition for vapor-depositing an organic layer onto a substrate to be treated for an organic electroluminescence diode is provided with: a bottom part 11 at which an organic material is arranged at the time of vapor deposition treatment; an opening part 13 from which the vaporized organic material is exhausted at the time of the vapor deposition; and at least one bent part 14 provided between the bottom part and the opening part in such a manner that the bottom part is not viewed from the opening part. Further, a vapor deposition system and a vapor deposition method are provided. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006104524(A) 申请公布日期 2006.04.20
申请号 JP20040293390 申请日期 2004.10.06
申请人 FUJI ELECTRIC HOLDINGS CO LTD 发明人 MATSUKAZE NORIYUKI
分类号 C23C14/24;C23C14/12;H01L51/50;H05B33/10 主分类号 C23C14/24
代理机构 代理人
主权项
地址