| 摘要 |
PROBLEM TO BE SOLVED: To improve the surface precision or the shape precision of an optical element by preventing the difference of temperature among places in a treating chamber or the fluctuation of temperature with time to carry out the precise control of the temperature in the treating chamber. SOLUTION: A plurality of heating units 8a-8d are provided in a case 5 of the treating chamber. In each of the heating units 8a-8d, an output ratio or a set temperature calculated to control (ease or suppress) the temperature gradient in the vertical direction in the treating chamber or the temperature gradient in the transporting direction of a formed body 4 is set. The measured temperature by a temperature sensor Sd for control and the temperature stored in a set temperature storing means 91 are compared by a comparing means 92 and a control means 93 controls the operation of the heating units 8a-8d by the set output ratio based on the comparison result. COPYRIGHT: (C)2006,JPO&NCIPI
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