| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique which, in the process of manufacturing a polyimide multilayer film, can attain efficient production even when the imidization is conducted by a chemical cure method and which can produce a high quality multilayer film. SOLUTION: By using a plurality of kinds of resin solutions containing polyimides or precursors thereof (polyamic acids), a liquid film consisting of each resin solution is formed by the lamination thereof on the surface of a support, and thereafter to the edge region of the width direction of the obtained liquid film (laminated liquid film) which is in a laminated state, an external force is applied to bring forth deformation. Concretely, for example, a method can be given wherein the pressure is applied by jetting a fluid against the surface of the laminated liquid film, and, as the fluid, gases such as air and nitrogen and liquids such as water can be used. COPYRIGHT: (C)2006,JPO&NCIPI
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