发明名称 HANDLING JIG AND STAND FOR HANDLING JIG
摘要 <P>PROBLEM TO BE SOLVED: To provide a handling jig for protecting a body to be handled against electrostatic breakdown, and to provide a stand for the handling jig. <P>SOLUTION: The handling jig 1 comprises a grip 2, a lever 3 fixed rotatably or reciprocally to the grip 2, a fixed arm 4 fixed to the grip 2, a rotary arm 5 fixed to the lever 3, and a pawl 6 fixed to the fixed arm 4 and the rotary arm 5 and abutting against a photomask substrate 10 wherein a conductive material or a material subjected to antistatic treatment with an antistatic agent is employed in the grip 2, the lever 3, the fixed arm 4, the rotary arm 5 and the pawl 6. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006108157(A) 申请公布日期 2006.04.20
申请号 JP20040288771 申请日期 2004.09.30
申请人 HOYA CORP 发明人 TAKUSHIMA KATSUHIRO
分类号 H01L21/677;B25B9/00;G03F1/40;G03F1/50;H01L21/027 主分类号 H01L21/677
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