| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inexpensive potential sensor allowing easy inspection of high reliability, using existing measuring instrument, a manufacturing method therefor, and a potential sensor device. <P>SOLUTION: This potential sensor is provided a substance detecting material 4 contacting a measured substance to cause a chemical reaction, a semiconductor substrate 1 having at least one recessed part 6 for storing the substance detecting material 4, and an electrode 3 provided in the semiconductor substrate 1, and the subject described above is solved by providing the potential sensor, capable of detecting changes in the potential due to the chemical reaction of the substance detecting material 4 with the measured substance, by means of the electrode 3. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
