发明名称 Monitor pattern of semiconductor device and method of manufacturing semiconductor device
摘要 A plurality of diffused resistors and a plurality of wirings (resistive elements) are alternately disposed along a virtual line, and those diffused resistors and wirings are connected in series by contact vias. In the same wiring layer as that of the wirings, a dummy pattern is formed so as to surround a formation region of the wirings and the diffused resistors. A space between the dummy pattern and the wirings is set in accordance with, for example, a minimum space between wirings in a chip formation portion.
申请公布号 US2006081842(A1) 申请公布日期 2006.04.20
申请号 US20050273294 申请日期 2005.11.15
申请人 FUJITSU LIMITED 发明人 TONE SACHIE;UNO HIROYUKI;TANAHASHI NAOKI;NISHIDA NAOKI
分类号 H01L23/52;H01L23/58;H01L21/3205;H01L23/544 主分类号 H01L23/52
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