| 摘要 |
PROBLEM TO BE SOLVED: To provide an article inspecting device and an article inspection method capable of finishing inspection of an article accurately, in a short time. SOLUTION: A CSP tape 16 on a guide surface 56A is irradiated linearly from the surface side, with a red light beam by the first reflection illumination device 82, and with a green light beam by the second reflection illumination device 84, and is irradiated linearly from the back side with a blue light beam by a transmission illuminating device 86. Red reflected light, green reflected light and blue transmitted light are inputted into a CCD line sensor 66. The first computer 68 performs image processing, based on image data in each color from the CCD line sensor 66 and detects a defect of the CSP tape 16. When detecting using the reflected light, since two kinds of light (red, green) having different irradiation angles and wavelengths are used, the defect detection accuracy is improved, as compared with the case of using a light having one kind of irradiation angle. COPYRIGHT: (C)2006,JPO&NCIPI
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