METHOD FOR FABRICATING POLARIZATION REVERSAL STRUCTURE AND POLARIZATION REVERSAL STRUCTURE

摘要

When polarization reversal parts are fabricated by a voltage application method, the variation in width of the polarization reversal parts is suppressed by reducing damage in the vicinity of the forward end of a comb electrode. A polarization reversal structure is fabricated by a voltage application method using a comb electrode having a plurality of electrode parts and power supply parts provided on one surface of a ferroelectric single crystal substrate divided into unit regions. The electrode parts (5) correspond to respective polarization reversal parts of the polarization reversal structure. Each electrode part (5) comprises a plurality of arrays of low-resistance pieces (12a-12e, 13a-13e, 14a-14e, 15a-15e, 16a-16e) arranged toward a direction F perpendicular to the longitudinal direction E of the electrode part (5) and spaced apart from each other.