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经营范围
发明名称
Method For Forming Intermetal Dielectric Film Of Semiconductor Devices
摘要
申请公布号
KR100571674(B1)
申请公布日期
2006.04.17
申请号
KR20030055646
申请日期
2003.08.12
申请人
发明人
分类号
H01L21/31
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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