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发明名称
KÜHLVORRICHTUNG FÜR EINEN CHIP SOWIE VERFAHREN ZU IHRER HERSTELLUNG
摘要
申请公布号
AT321361(T)
申请公布日期
2006.04.15
申请号
AT20020792574T
申请日期
2002.12.17
申请人
FOTEC FORSCHUNGS- UND TECHNOLOGIETRANSFER GMBH
发明人
GRIESMAYER, ERICH
分类号
(IPC1-7):H01L23/367
主分类号
(IPC1-7):H01L23/367
代理机构
代理人
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